ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,700,567, issued on Aug. 4, was assigned to Lam Research Corp. (Fremont, Calif.). "Multi-state RF pulsing in cycling recipes to reduce charging i... Read More
ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,700,568, issued on Aug. 4, was assigned to Lam Research Corp. (Fremont, Calif.). "Systems and methods for reducing reflected power after a state... Read More
ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,700,569, issued on Aug. 4, was assigned to Advanced Energy Industries Inc. (Denver). "Control of plasma sheath with bias supplies" was invented ... Read More
ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,700,570, issued on Aug. 4, was assigned to ASM America Inc.. "RF impedance matching network" was invented by Imran Ahmed Bhutta (Moorestown, N.J... Read More
ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,700,571, issued on Aug. 4, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Solid state variable capacitors for RF matches" was in... Read More
ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,700,572, issued on Aug. 4, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea). "Plasma control device" was invented by Ha Dong... Read More
ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,700,573, issued on Aug. 4, was assigned to MKS Inc. (Andover, Mass.). "Apparatus and tuning method for mitigating RF load impedance variations d... Read More
ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,700,574, issued on Aug. 4, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.). "Heat shield assemblies for minimizing heat radiation t... Read More
ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,700,575, issued on Aug. 4, was assigned to Tokyo Electron Ltd. (Tokyo). "Plasma processing apparatus and plasma processing method" was invented ... Read More
ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,700,576, issued on Aug. 4, was assigned to Tokyo Electron Ltd. (Tokyo). "Plasma processing apparatus and plasma processing method" was invented ... Read More