ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,700,572, issued on Aug. 4, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).
"Plasma control device" was invented by Ha Dong Jin (Suwon-si, South Korea), Nam Kyun Kim (Suwon-si, South Korea), Sung-Yeol Kim (Suwon-si, South Korea), Sung Yong Lim (Suwon-si, South Korea), Kyung-Sun Kim (Suwon-si, South Korea) and Dong Hyeon Na (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A plasma control device includes a chamber, in which a plasma process is performed, including a first electrode and a second electrode, a power generator connected to the second electrode and applying a bias voltage to the chamber, and a first im...