US Patent Issued to MKS on Aug. 4 for "Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbances" (Massachusetts Inventors)

ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,700,573, issued on Aug. 4, was assigned to MKS Inc. (Andover, Mass.).

"Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbances" was invented by Aaron M. Burry (Andover, Mass.), Aaron T. Radomski (Andover, Mass.), Mariusz Oldziej (Andover, Mass.), Peter Paul (Andover, Mass.) and Ross Reinhardt (Andover, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A radio frequency (RF) generator includes a power source configured to generate an RF signal applied to the load and a power controller coupled to the power source. The power controller is configured to generate a control signal to vary the RF signal, wherein ...