ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,700,568, issued on Aug. 4, was assigned to Lam Research Corp. (Fremont, Calif.).
"Systems and methods for reducing reflected power after a state transition" was invented by Ranadeep Bhowmick (San Jose, Calif.) and John Holland (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for reducing reflected power associated with a high frequency (HF) radio frequency (RF) generator after a transition state is described. The method includes controlling the HF RF generator to divide a state of an HF RF signal into a plurality of sub-states. The plurality of sub-states include a first sub-state and a second sub-state. The method further includ...