US Patent Issued to Applied Materials on Aug. 4 for "Solid state variable capacitors for RF matches" (California, Washington Inventors)

ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,700,571, issued on Aug. 4, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Solid state variable capacitors for RF matches" was invented by Yue Guo (Redwood City, Calif.), A N M Wasekul Azad (Santa Clara, Calif.), Yang Yang (San Diego), Kartik Ramaswamy (San Jose, Calif.) and Nicolas J. Bright (Arlington, Wash.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the present disclosure provide a system for fast impedance tuning. The system includes a radio frequency (RF) generator to generate power, a plasma chamber to receive the power from the RF generator and a RF matching network inserted between the RF generator and the plasma...