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US Patent Issued to EBARA on Oct. 27 for "Substrate processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,777,879, issued on Oct. 27, was assigned to EBARA Corp. (Tokyo). "Substrate processing apparatus" was invented by Akihiro Yazawa (Tokyo), Hirot... Read More


US Patent Issued to FOREHOPE ELECTRONIC (NINGBO) on Oct. 27 for "Preparation method of fan-in package structure, and fan-in package structure" (Chinese Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,777,880, issued on Oct. 27, was assigned to FOREHOPE ELECTRONIC (NINGBO) Co. LTD. (Ningbo City, China). "Preparation method of fan-in package s... Read More


US Patent Issued to Tokyo Electron on Oct. 27 for "Systems and methods for determining a localized fluid velocity of a processing liquid dispensed on a spinning substrate by tracking movement of an induced perturbation in the processing liquid across the spinning substrate" (Texas, New York Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,777,881, issued on Oct. 27, was assigned to Tokyo Electron Ltd. (Tokyo). "Systems and methods for determining a localized fluid velocity of a p... Read More


US Patent Issued to Applied Materials on Oct. 27 for "Substrate carrier detection using contactless communication" (California, Texas Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,777,882, issued on Oct. 27, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Substrate carrier detection using contactless commun... Read More


US Patent Issued to KWANSEI GAKUIN EDUCATIONAL FOUNDATION, TOYO ALUMINIUM, TOYOTA TSUSHO on Oct. 27 for "Method for producing aluminum nitride substrate, aluminum nitride substrate, and method for suppressing occurrence of cracks in aluminum nitride layer" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,777,883, issued on Oct. 27, was assigned to KWANSEI GAKUIN EDUCATIONAL FOUNDATION (Hyogo, Japan), TOYO ALUMINIUM K.K. (Osaka, Japan) and TOYOTA ... Read More


US Patent Issued to Mitsubishi Electric on Oct. 27 for "Semiconductor inspection apparatus and semiconductor manufacturing apparatus" (Japanese Inventor)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,777,884, issued on Oct. 27, was assigned to Mitsubishi Electric Corp. (Tokyo). "Semiconductor inspection apparatus and semiconductor manufactur... Read More


US Patent Issued to SAMSUNG ELECTRONICS on Oct. 27 for "Wafer cleaning apparatus and wafer cleaning system including the same" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,777,885, issued on Oct. 27, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea). "Wafer cleaning apparatus and wafer cleaning ... Read More


US Patent Issued to Entegris on Oct. 27 for "Substrate container, and door locking mechanism thereof" (Colorado, Minnesota Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,777,886, issued on Oct. 27, was assigned to Entegris Inc. (Billerica, Mass.). "Substrate container, and door locking mechanism thereof" was inv... Read More


US Patent Issued to SHIN-ETSU HANDOTAI on Oct. 27 for "Method for carrying wafer and wafer-carrying apparatus" (Japanese Inventor)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,777,887, issued on Oct. 27, was assigned to SHIN-ETSU HANDOTAI Co. LTD. (Tokyo). "Method for carrying wafer and wafer-carrying apparatus" was i... Read More


US Patent Issued to SCREEN Holdings on Oct. 27 for "Centering device and substrate processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,777,888, issued on Oct. 27, was assigned to SCREEN Holdings Co. Ltd. (Kyoto, Japan). "Centering device and substrate processing apparatus" was ... Read More