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US Patent Issued to FEI on July 28 for "Condensate precursors and contaminant purge apparatus and methods" (Oregon Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,052, issued on July 28, was assigned to FEI Co. (Hillsboro, Ore.). "Condensate precursors and contaminant purge apparatus and methods" was ... Read More


US Patent Issued to ASML NETHERLANDS on July 28 for "Self-referencing health monitoring system for multi-beam SEM tools" (California Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,053, issued on July 28, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands). "Self-referencing health monitoring system for mult... Read More


US Patent Issued to Applied Materials Israel on July 28 for "Precision in stereoscopic measurements using a pre-deposition layer" (Israeli Inventor)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,054, issued on July 28, was assigned to Applied Materials Israel Ltd. (Rehovot, Israel). "Precision in stereoscopic measurements using a pr... Read More


US Patent Issued to IMS Nanofabrication on July 28 for "Optimizing image distortion in a multi beam charged particle processing apparatus" (Austrian Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,055, issued on July 28, was assigned to IMS Nanofabrication GmbH (Brunn am Gebirge, Austria). "Optimizing image distortion in a multi beam ... Read More


US Patent Issued to Applied Materials on July 28 for "Apparatus and techniques for substrate processing using independent ion source and radical source" (Massachusetts Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,056, issued on July 28, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Apparatus and techniques for substrate processing us... Read More


US Patent Issued to SAMSUNG ELECTRONICS on July 28 for "Voltage waveform controlling method, substrate processing method, and substrate processing apparatus" (South Korean Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,057, issued on July 28, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea). "Voltage waveform controlling method, substra... Read More


US Patent Issued to MKS on July 28 for "Plasma process control of multi-electrode systems equipped with ion energy sensors" (New York, Florida Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,058, issued on July 28, was assigned to MKS Inc. (Andover, Mass.). "Plasma process control of multi-electrode systems equipped with ion ene... Read More


US Patent Issued to Lam Research on July 28 for "Synchronization of RF pulsing schemes and of sensor data collection" (California Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,059, issued on July 28, was assigned to Lam Research Corp. (Fremont, Calif.). "Synchronization of RF pulsing schemes and of sensor data col... Read More


US Patent Issued to Lam Research on July 28 for "Control of mask CD" (Georgia, California Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,060, issued on July 28, was assigned to Lam Research Corp. (Fremont, Calif.). "Control of mask CD" was invented by Beibei Jiang (Alpharatte... Read More


US Patent Issued to Lam Research on July 28 for "Impedance match with an elongated RF strap" (California Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,061, issued on July 28, was assigned to Lam Research Corp. (Fremont, Calif.). "Impedance match with an elongated RF strap" was invented by ... Read More