US Patent Issued to SAMSUNG ELECTRONICS on July 28 for "Voltage waveform controlling method, substrate processing method, and substrate processing apparatus" (South Korean Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,057, issued on July 28, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Voltage waveform controlling method, substrate processing method, and substrate processing apparatus" was invented by Hyong seo Yoon (Suwon-si, South Korea), Hyunbae Kim (Suwon-si, South Korea), Yeonguk Kim (Suwon-si, South Korea), Yonghee Kim (Suwon-si, South Korea), Hyungjun Kim (Suwon-si, South Korea), Jina Jeon (Suwon-si, South Korea), Junghyun Cho (Suwon-si, South Korea), Sungwook Hong (Suwon-si, South Korea) and Wonsub Hwang (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a voltage waveform control method comprising ...