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US Patent Issued to Lam Research on Aug. 25 for "Cooling for a plasma-based reactor" (California Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,018, issued on Aug. 25, was assigned to Lam Research Corp. (Fremont, Calif.). "Cooling for a plasma-based reactor" was invented by John Ste... Read More


US Patent Issued to Tokyo Electron on Aug. 25 for "Plasma processing method and plasma processing apparatus" (Japanese Inventor)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,019, issued on Aug. 25, was assigned to Tokyo Electron Ltd. (Tokyo). "Plasma processing method and plasma processing apparatus" was invente... Read More


US Patent Issued to Tokyo Electron on Aug. 25 for "Plasma processing apparatus and method for controlling source frequency of source radio-frequency power" (Japanese Inventor)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,020, issued on Aug. 25, was assigned to Tokyo Electron Ltd. (Tokyo). "Plasma processing apparatus and method for controlling source frequen... Read More


US Patent Issued to Applied Materials on Aug. 25 for "Smart dynamic load simulator for RF power delivery control system" (California, Texas Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,021, issued on Aug. 25, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Smart dynamic load simulator for RF power delivery c... Read More


US Patent Issued to Lam Research, Advanced Energy Industries on Aug. 25 for "Fast frequency tracking control for radiofrequency power amplifiers with rapidly changing plasma loads" (California Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,022, issued on Aug. 25, was assigned to Lam Research Corp. (Fremont, Calif.) and Advanced Energy Industries Inc. (Denver). "Fast frequency ... Read More


US Patent Issued to Shibaura Machine on Aug. 25 for "Surface treatment apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,023, issued on Aug. 25, was assigned to Shibaura Machine Co. Ltd. (Tokyo). "Surface treatment apparatus" was invented by Rintaro Sueki (Num... Read More


US Patent Issued to 6K on Aug. 25 for "Plasma apparatus and methods for processing feed material utilizing an upstream swirl module and composite gas flows" (Massachusetts, Florida Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,024, issued on Aug. 25, was assigned to 6K Inc. (North Andover, Mass.). "Plasma apparatus and methods for processing feed material utilizin... Read More


US Patent Issued to Tokyo Electron on Aug. 25 for "Methods for semiconductor process chamber" (New York Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,025, issued on Aug. 25, was assigned to Tokyo Electron Ltd. (Tokyo). "Methods for semiconductor process chamber" was invented by Qi Wang (A... Read More


US Patent Issued to Applied Materials on Aug. 25 for "Rare-earth oxide based erosion resistant coatings for semiconductor application" (California Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,026, issued on Aug. 25, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Rare-earth oxide based erosion resistant coatings fo... Read More


US Patent Issued to Tokyo Electron on Aug. 25 for "Plasma processing apparatus" (Japanese Inventor)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,027, issued on Aug. 25, was assigned to Tokyo Electron Ltd. (Tokyo). "Plasma processing apparatus" was invented by Takahiro Shindo (Nirasak... Read More