US Patent Issued to Lam Research on Aug. 25 for "Cooling for a plasma-based reactor" (California Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,018, issued on Aug. 25, was assigned to Lam Research Corp. (Fremont, Calif.).

"Cooling for a plasma-based reactor" was invented by John Stephen Drewery (San Jose, Calif.) and Neil Martin Paul Benjamin (Palo Alto, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "In one embodiment, the disclosed apparatus is a heat-pipe cooling system that includes a conical structure having an upper portion that is configured to be formed above a dielectric window with the conical structure being configured to condense vapor from a heat-transfer fluid placed or incorporated within a volume formed between the dielectric window and the conical structure. At least ...