US Patent Issued to Applied Materials on Aug. 25 for "Rare-earth oxide based erosion resistant coatings for semiconductor application" (California Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,026, issued on Aug. 25, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Rare-earth oxide based erosion resistant coatings for semiconductor application" was invented by Jennifer Y. Sun (Mountain View, Calif.), Biraja P. Kanungo (San Jose, Calif.) and Tom Cho (Los Altos, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range between about 0 mol % to about 55 mol %, and Al2O3 in a range between about 0 mol % to about 10 mol %. The ceramic coating may alternatively incl...