US Patent Issued on May 19 for "Methods for making semiconductor devices" (South Korean Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,470, issued on May 19. "Methods for making semiconductor devices" was invented by GunHyuck Lee (Incheon, South Korea) and Yujeong Jang (Inch... Read More

US Patent Issued to DISCO on May 19 for "Method of laying protective sheet and protective sheet" (Japanese Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,471, issued on May 19, was assigned to DISCO Corp. (Tokyo). "Method of laying protective sheet and protective sheet" was invented by Koshiro... Read More

US Patent Issued to KLA on May 19 for "Cleanroom compatible robotic end effector exchange system" (California Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,472, issued on May 19, was assigned to KLA Corp. (Milpitas, Calif.). "Cleanroom compatible robotic end effector exchange system" was invente... Read More

US Patent Issued to Lam Research on May 19 for "Flat bottom shadow ring" (California Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,473, issued on May 19, was assigned to Lam Research Corp. (Fremont, Calif.). "Flat bottom shadow ring" was invented by Lai Wei (Fremont, Cal... Read More

US Patent Issued to ASM IP Holding on May 19 for "Method, assembly and system for gas injection and control" (Arizona Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,474, issued on May 19, was assigned to ASM IP Holding B.V. (Almere, Netherlands). "Method, assembly and system for gas injection and control... Read More

US Patent Issued to ASM IP Holding on May 19 for "Vented susceptor" (California, Arizona Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,475, issued on May 19, was assigned to ASM IP Holding B.V. (Almere, Netherlands). "Vented susceptor" was invented by Uday Kiran Rokkam (San ... Read More

US Patent Issued to BEIJING NAURA MICROELECTRONICS EQUIPMENT on May 19 for "Wafer cleaning equipment, wafer chuck, and wafer cleaning method" (Chinese Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,476, issued on May 19, was assigned to BEIJING NAURA MICROELECTRONICS EQUIPMENT Co. LTD. (Beijing). "Wafer cleaning equipment, wafer chuck, ... Read More

US Patent Issued to EV GROUP E. THALLNER on May 19 for "Substrate holder with central elevation and support elevations and method for producing a substrate holder for bonding thereof" (Austrian Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,477, issued on May 19, was assigned to EV GROUP E. THALLNER GMBH (St. Florian am Inn, Austria). "Substrate holder with central elevation and... Read More

US Patent Issued to SCREEN HOLDINGS on May 19 for "Substrate cleaning device, substrate processing apparatus and substrate cleaning method" (Japanese Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,478, issued on May 19, was assigned to SCREEN HOLDINGS Co. LTD. (Japan). "Substrate cleaning device, substrate processing apparatus and subs... Read More

US Patent Issued to NITERRA on May 19 for "Substrate holder" (Japanese Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,479, issued on May 19, was assigned to NITERRA Co. LTD. (Nagoya, Japan). "Substrate holder" was invented by Makoto Hino (Nagoya, Japan), Tet... Read More

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