US Patent Issued to SCREEN HOLDINGS on May 19 for "Substrate cleaning device, substrate processing apparatus and substrate cleaning method" (Japanese Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,478, issued on May 19, was assigned to SCREEN HOLDINGS Co. LTD. (Japan).

"Substrate cleaning device, substrate processing apparatus and substrate cleaning method" was invented by Tomoyuki Shinohara (Kyoto, Japan), Yoshifumi Okada (Kyoto, Japan), Nobuaki Okita (Kyoto, Japan), Hiroshi Kato (Kyoto, Japan) and Takashi Shinohara (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A first substrate holder holds an outer peripheral end of a substrate. A second substrate holder holds a lower-surface center region of the substrate by suction at a position farther downward than the first substrate holder. The second substrate holder and the lower-surf...