US Patent Issued to ASM IP Holding on May 19 for "Method, assembly and system for gas injection and control" (Arizona Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,474, issued on May 19, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Method, assembly and system for gas injection and control" was invented by Peipei Gao (Chandler, Ariz.), Wentao Wang (Chandler, Ariz.), Han Ye (Phoenix), Kai Zhou (Phoenix), Fan Gao (Chandler, Ariz.) and Xing Lin (Chandler, Ariz.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods, systems, and assemblies suitable for gas-phase processes are disclosed. An exemplary assembly includes a susceptor ring and at least one injector tube. The injector tube can be disposed within the susceptor ring to provide a gas to a peripheral region of a substrate. Methods, systems, and...