US Patent Issued to Tokyo Electron on May 19 for "Substrate processing apparatus, substrate processing method and storage medium" (Japanese Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,450, issued on May 19, was assigned to Tokyo Electron Ltd. (Tokyo). "Substrate processing apparatus, substrate processing method and storage... Read More

US Patent Issued to Beijing E-Town Semiconductor Technology, Mattson Technology on May 19 for "Support plate for localized heating in thermal processing systems" (German, American Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,451, issued on May 19, was assigned to Beijing E-Town Semiconductor Technology Co. Ltd. (Beijing) and Mattson Technology Inc (Fremont, Calif.... Read More

US Patent Issued to JUSUNG ENGINEERING on May 19 for "Substrate processing apparatus" (South Korean Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,452, issued on May 19, was assigned to JUSUNG ENGINEERING Co. LTD. (South Korea). "Substrate processing apparatus" was invented by In Woo Ba... Read More

US Patent Issued to Tokyo Electron on May 19 for "Temperature control device, substrate processing apparatus, and liquid amount control method" (Japanese Inventor)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,453, issued on May 19, was assigned to Tokyo Electron Ltd. (Tokyo). "Temperature control device, substrate processing apparatus, and liquid ... Read More

US Patent Issued to Taiwan Semiconductor Manufacturing on May 19 for "Systems and methods for determining residual compounds in plasma process" (Taiwanese Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,454, issued on May 19, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan). "Systems and methods for determining r... Read More

US Patent Issued to SAMSUNG ELECTRONICS on May 19 for "Semiconductor process device and method of monitoring semiconductor process" (South Korean Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,455, issued on May 19, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Suwon-si, South Korea). "Semiconductor process device and method of mon... Read More

US Patent Issued to Kokusai Electric on May 19 for "Method of displaying substrate arrangement data, method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,456, issued on May 19, was assigned to Kokusai Electric Corp. (Tokyo). "Method of displaying substrate arrangement data, method of manufactu... Read More

US Patent Issued to Tokyo Electron on May 19 for "Substrate processing system, substrate processing method, and map creating device" (Japanese Inventor)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,457, issued on May 19, was assigned to Tokyo Electron Ltd. (Tokyo). "Substrate processing system, substrate processing method, and map creat... Read More

US Patent Issued to ASM IP Holding on May 19 for "Substrate storage racks for semiconductor processing systems" (American, Indian Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,458, issued on May 19, was assigned to ASM IP Holding B.V. (Almere, Netherlands). "Substrate storage racks for semiconductor processing syst... Read More

US Patent Issued to SEMICONDUCTOR COMPONENTS INDUSTRIES on May 19 for "Temporary substrate carriers" (Arizona Inventor)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,459, issued on May 19, was assigned to SEMICONDUCTOR COMPONENTS INDUSTRIES LLC (Scottsdale, Ariz.). "Temporary substrate carriers" was inven... Read More

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