US Patent Issued to Kokusai Electric on May 19 for "Method of displaying substrate arrangement data, method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,456, issued on May 19, was assigned to Kokusai Electric Corp. (Tokyo).

"Method of displaying substrate arrangement data, method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus" was invented by Yuna Suizu (Toyama, Japan), Hajime Abiko (Toyama, Japan), Susumu Nishiura (Toyama, Japan), Mitsuru Funakura (Toyama, Japan) and Takuya Kato (Toyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "According to one aspect of the technique of the present disclosure, there is provided a method of displaying substrate arrangement data, including: (a) setting each of a transport paramet...