US Patent Issued to ASM IP Holding on May 19 for "Substrate storage racks for semiconductor processing systems" (American, Indian Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,458, issued on May 19, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Substrate storage racks for semiconductor processing systems" was invented by Gurupkar Nerwal (Tempe, Ariz.) and Senthil Sivaraman (Chennai, India).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate storage rack for a semiconductor processing system includes a bottom plate, a top plate, and a column assembly. The top plate is spaced apart from the bottom plate, the column assembly connects the top plate to the bottom plate, and a ball member is compressively seated within the column assembly. The ball member protrudes from the column assembly in a direction towa...