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US Patent Issued to KOREA INSTITUTE OF FUSION ENERGY on Oct. 20 for "Electrode for capacitively coupled plasma generating device, capacitively coupled plasma generating device comprising same, and capacitively coupled plasma uniformity adjusting method" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,827, issued on Oct. 20, was assigned to KOREA INSTITUTE OF FUSION ENERGY (Daejeon, South Korea). "Electrode for capacitively coupled plasma... और पढ़ें


US Patent Issued to Applied Materials on Oct. 20 for "Multi-electrode source assembly for plasma processing" (California Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,828, issued on Oct. 20, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Multi-electrode source assembly for plasma processin... और पढ़ें


US Patent Issued to Lam Research on Oct. 20 for "Systems and methods for extracting process control information from radiofrequency supply system of plasma processing system" (California Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,829, issued on Oct. 20, was assigned to Lam Research Corp. (Fremont, Calif.). "Systems and methods for extracting process control informati... और पढ़ें


US Patent Issued to SST on Oct. 20 for "High frequency reaction processing apparatus and high frequency reaction processing system" (Japanese Inventor)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,830, issued on Oct. 20, was assigned to SST INC. (Chiba, Japan). "High frequency reaction processing apparatus and high frequency reaction ... और पढ़ें


US Patent Issued to NISSIN ION EQUIPMENT on Oct. 20 for "Ion source and operating method thereof" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,831, issued on Oct. 20, was assigned to NISSIN ION EQUIPMENT Co. LTD. (Koka-city, Japan). "Ion source and operating method thereof" was inv... और पढ़ें


US Patent Issued to Lam Research on Oct. 20 for "Multi-location gas injection to improve uniformity in rapid alternating processes" (California Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,832, issued on Oct. 20, was assigned to Lam Research Corp. (Fremont, Calif.). "Multi-location gas injection to improve uniformity in rapid ... और पढ़ें


US Patent Issued to Applied Materials on Oct. 20 for "Plasma chamber with a multiphase rotating gas cross-flow and peripheral conductance control rings" (California Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,833, issued on Oct. 20, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Plasma chamber with a multiphase rotating gas cross-... और पढ़ें


US Patent Issued to ASM IP Holding on Oct. 20 for "Plasma enhanced epitaxial chemical vapor deposition system" (Arizona Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,834, issued on Oct. 20, was assigned to ASM IP Holding B.V. (Almere, Netherlands). "Plasma enhanced epitaxial chemical vapor deposition sys... और पढ़ें


US Patent Issued to Lam Research on Oct. 20 for "Coated part for plasma processing chamber" (California Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,835, issued on Oct. 20, was assigned to Lam Research Corp. (Fremont, Calif.). "Coated part for plasma processing chamber" was invented by L... और पढ़ें


US Patent Issued to SEMES on Oct. 20 for "Apparatus for treating substrate" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,836, issued on Oct. 20, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea). "Apparatus for treating substrate" was invented by... और पढ़ें