US Patent Issued to Applied Materials on Oct. 20 for "Plasma chamber with a multiphase rotating gas cross-flow and peripheral conductance control rings" (California Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,833, issued on Oct. 20, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Plasma chamber with a multiphase rotating gas cross-flow and peripheral conductance control rings" was invented by Rajinder Dhindsa (Pleasanton, Calif.), Kenneth S. Collins (San Jose, Calif.), Michael R. Rice (Pleasanton, Calif.) and James D. Carducci (Sunnyvale, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A plasma treatment chamber comprises one or more sidewalls. A support surface within the one or more sidewalls holds a workpiece. A first gas injector along the one or more sidewalls injects a first gas flow in a first direction generally parallel to a...