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US Patent Issued to ZEON on April 14 for "Negative photosensitive resin composition" (Japanese Inventor)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,971, issued on April 14, was assigned to ZEON Corp. (Tokyo). "Negative photosensitive resin composition" was invented by Takashi Tsutsumi ... Read More


US Patent Issued to Semes on April 14 for "System for supplying photoresist and method for managing photoresist" (South Korean Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,973, issued on April 14, was assigned to Semes Co. LTD. (Cheonan-si, South Korea). "System for supplying photoresist and method for managi... Read More


US Patent Issued to Lam Research on April 14 for "Bake strategies to enhance lithographic performance of metal-containing resist" (California Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,974, issued on April 14, was assigned to Lam Research Corp. (Fremont, Calif.). "Bake strategies to enhance lithographic performance of met... Read More


US Patent Issued to Lam Research on April 14 for "All-in-one dry development for metal-containing photoresist" (California Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,976, issued on April 14, was assigned to Lam Research Corp. (Fremont, Calif.). "All-in-one dry development for metal-containing photoresis... Read More


US Patent Issued to UNITED MICROELECTRONICS on April 14 for "Optimization method for mask pattern optical transfer" (Taiwanese Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,977, issued on April 14, was assigned to UNITED MICROELECTRONICS CORP. (Hsinchu, Taiwan). "Optimization method for mask pattern optical tr... Read More


US Patent Issued to CARL ZEISS SMT, ASML NETHERLANDS on April 14 for "Method of setting up a projection exposure system, a projection exposure method and a projection exposure system for microlithography" (German, Dutch Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,978, issued on April 14, was assigned to CARL ZEISS SMT GMBH (Oberkochen, Germany) and ASML NETHERLANDS B.V. (Veldhoven, Netherlands). "Me... Read More


US Patent Issued to KLA on April 14 for "Multi-column large field of view imaging platform" (Israeli, American Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,979, issued on April 14, was assigned to KLA Corp. (Milpitas, Calif.). "Multi-column large field of view imaging platform" was invented by... Read More


US Patent Issued to NIKON on April 14 for "Stage apparatus, exposure apparatus, method of manufacturing flat panel display, and device manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,980, issued on April 14, was assigned to NIKON Corp. (Tokyo). "Stage apparatus, exposure apparatus, method of manufacturing flat panel dis... Read More


US Patent Issued to GUDENG PRECISION INDUSTRIAL on April 14 for "Reticle loading system and method using the same" (Taiwanese Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,981, issued on April 14, was assigned to GUDENG PRECISION INDUSTRIAL Co. LTD. (New Taipei, Taiwan). "Reticle loading system and method usi... Read More


US Patent Issued to GUDENG PRECISION INDUSTRIAL on April 14 for "Workpiece container system" (Taiwanese Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,982, issued on April 14, was assigned to GUDENG PRECISION INDUSTRIAL Co. LTD (New Taipei, Taiwan). "Workpiece container system" was invent... Read More