ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,981, issued on April 14, was assigned to GUDENG PRECISION INDUSTRIAL Co. LTD. (New Taipei, Taiwan).
"Reticle loading system and method using the same" was invented by Ming-Chien Chiu (New Taipei, Taiwan), Chia-Ho Chuang (New Taipei, Taiwan), Hsin-Min Hsueh (New Taipei, Taiwan) and Hsing-Min Wen (New Taipei, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention discloses a reticle storage pod including an outer pod which includes an outer cover and an outer base. The outer cover and the outer base can be coupled to securely accommodate one of a first inner pod and a second inner pod that are differently structured in the outer ...