ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,706,278, issued on Aug. 11, was assigned to Lam Research Corp. (Fremont, Calif.). "Hybrid frequency plasma source" was invented by Yuhou Wang (... Read More
ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,706,279, issued on Aug. 11, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea). "Apparatus and method for processing substrate usi... Read More
ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,706,280, issued on Aug. 11, was assigned to Tokyo Electron Ltd. (Tokyo). "Detection device, processing system, and transfer method" was invente... Read More
ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,706,281, issued on Aug. 11, was assigned to Micron Technology Inc. (Boise, Idaho). "Erosion rate monitoring for wafer fabrication equipment" wa... Read More
ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,706,282, issued on Aug. 11, was assigned to Tokyo Electron Ltd. (Tokyo). "Substrate support and substrate processing apparatus" was invented by... Read More
ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,706,283, issued on Aug. 11, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea). "Substrate processing apparatus" was invented by Young Hw... Read More
ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,706,284, issued on Aug. 11, was assigned to Resonac Corp. (Tokyo). "Adhesion removal method and film-forming method" was invented by Yosuke Tan... Read More
ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,706,285, issued on Aug. 11, was assigned to IBSS Group (San Francisco). "System and method for adaptive cleaning of a high-vacuum chamber" was ... Read More
ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,706,286, issued on Aug. 11, was assigned to HITACHI HIGH-TECH Corp. (Tokyo). "Plasma processing method and plasma processing apparatus" was inv... Read More
ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,706,287, issued on Aug. 11, was assigned to Tokyo Electron Ltd. (Tokyo). "Plasma etching with metal sputtering" was invented by Minjoon Park (A... Read More