ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,706,283, issued on Aug. 11, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Substrate processing apparatus" was invented by Young Hwan Yang (Yongin-si, South Korea), Soo Ryun Ro (Suwon-si, South Korea) and Jeong Seok Kang (Seongnam-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Proposed is a substrate processing apparatus capable of replacing consumables and, more particularly, to a technique for supporting replacement of consumables such as a shower head and a focus ring while maintaining a chamber processing environment of the substrate processing apparatus."
The patent was filed on Oct. 23, 2022, under Application No. 17/9...