ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,701,958, issued on Aug. 4, was assigned to ENTEGRIS INC. (Billerica, Mass.). "Reticle pod having coated sensor zones" was invented by Russ V. Ra... Read More
ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,701,959, issued on Aug. 4, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea). "Wafer storage and transport system and method ... Read More
ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,701,960, issued on Aug. 4, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Bipolar ESC to prevent substrate backside discharging"... Read More
ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,701,961, issued on Aug. 4, was assigned to Tokyo Institute of Technology (Tokyo). "Electrostatic attraction device and electrostatic adsorption ... Read More
ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,701,962, issued on Aug. 4, was assigned to Sumitomo Osaka Cement Co. Ltd. (Tokyo). "Electrostatic chuck device with an improved electrostatic ch... Read More
ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,701,963, issued on Aug. 4, was assigned to DISCO Corp. (Tokyo). "Expanding machine and expanding method" was invented by Kaoru Amano (Tokyo) and... Read More
ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,701,964, issued on Aug. 4, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan). "Methods and systems for dry etchi... Read More
ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,701,965, issued on Aug. 4, was assigned to LAM RESEARCH AG (Villach, Austria). "Apparatus for processing a wafer-shaped article" was invented by... Read More
ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,701,966, issued on Aug. 4, was assigned to BEIJING NAURA MICROELECTRONICS EQUIPMENT Co. LTD. (Beijing). "Semiconductor process device and wafer ... Read More
ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,701,967, issued on Aug. 4, was assigned to Applied Materials Israel Ltd. (Rehovot, Israel). "Substrate handling system background" was invented ... Read More