US Patent Issued to Applied Materials on Aug. 4 for "Bipolar ESC to prevent substrate backside discharging" (California Inventors)

ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,701,960, issued on Aug. 4, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Bipolar ESC to prevent substrate backside discharging" was invented by Jian Li (Fremont, Calif.), Ganesh Balasubramanian (Fremont, Calif.), Govindarajasekhar Singu (Santa Clara, Calif.) and Juan Carlos Rocha-Alvarez (San Carlos, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the present disclosure provide an electrostatic chuck including a ring surrounding a top surface of the electrostatic chuck and a mesa extending along a diameter of the top surface of the electrostatic chuck such that the mesa contacts the ring on opposed ends thereof. The ...