ALEXANDRIA, Va., July 21 -- United States Patent no. 12,688,999, issued on July 21, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Symmetric antenna arrays for high density plasma enh... Read More
ALEXANDRIA, Va., July 21 -- United States Patent no. 12,689,000, issued on July 21, was assigned to Semes Co. Ltd. (Cheonan-si, South Korea). "Substrate processing apparatus" was invented by Sangjeon... Read More
ALEXANDRIA, Va., July 21 -- United States Patent no. 12,689,001, issued on July 21, was assigned to Tokyo Electron Ltd. (Tokyo). "Plasma potential adjustment circuit" was invented by Qiang Wang (Aust... Read More
ALEXANDRIA, Va., July 21 -- United States Patent no. 12,689,002, issued on July 21, was assigned to Tokyo Electron Ltd. (Tokyo). "Plasma processing apparatus, power source system, and plasma processi... Read More
ALEXANDRIA, Va., July 21 -- United States Patent no. 12,689,003, issued on July 21, was assigned to Tokyo Electron Ltd. (Tokyo). "Film deposition apparatus" was invented by Taehoon Park (Gyeonggi-do,... Read More
ALEXANDRIA, Va., July 21 -- United States Patent no. 12,689,004, issued on July 21, was assigned to Tokyo Electron Ltd. (Tokyo) and The University of Shiga Prefecture (Shiga, Japan). "Plasma processi... Read More
ALEXANDRIA, Va., July 21 -- United States Patent no. 12,689,005, issued on July 21, was assigned to WONIK IPS Co. LTD. (Pyeongtaek-si, South Korea). "Substrate processing apparatus" was invented by Y... Read More
ALEXANDRIA, Va., July 21 -- United States Patent no. 12,689,006, issued on July 21, was assigned to Tokyo Electron Ltd. (Tokyo). "Etching method and plasma processing apparatus" was invented by Takas... Read More
ALEXANDRIA, Va., July 21 -- United States Patent no. 12,689,007, issued on July 21, was assigned to TOTO Ltd. (Fukuoka, Japan). "Structural member" was invented by Morio Hosokawa (Fukuoka, Japan) and... Read More
ALEXANDRIA, Va., July 21 -- United States Patent no. 12,689,009, issued on July 21, was assigned to Tokyo Electron Ltd. (Tokyo). "Substrate transfer system and transfer module" was invented by Toshia... Read More