US Patent Issued to Semes on July 21 for "Substrate processing apparatus" (South Korean Inventors)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,689,000, issued on July 21, was assigned to Semes Co. Ltd. (Cheonan-si, South Korea).

"Substrate processing apparatus" was invented by Sangjeong Lee (Hwaseong-si, South Korea), Youngun Bong (Suwon-si, South Korea), Yoonseok Choi (Suwon-si, South Korea), Jaewon Shin (Suwon-si, South Korea), Hanlim Kang (Seoul, South Korea), Jongwon Park (Hwaseong-si, South Korea), Hyunwoo Jo (Hwaseong-si, South Korea) and Kyunghun Jang (Jeonju-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a substrate processing apparatus including a chamber having a processing space therein, a dielectric window arranged at an upper portion of the chambe...