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US Patent Issued to Oerlikon Surface Solutions, Pfaffikon on April 14 for "Ag- and/or Cu-containing hard coatings with antibacterial, antiviral and antifungal properties" (Swiss Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,049, issued on April 14, was assigned to Oerlikon Surface Solutions AG, Pfaffikon (Pfaffikon, Switzerland). "Ag- and/or Cu-containing hard... Read More


US Patent Issued to ENTEGRIS on April 14 for "Surface modified substrates and related methods" (Massachusetts Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,050, issued on April 14, was assigned to ENTEGRIS INC. (Billerica, Mass.). "Surface modified substrates and related methods" was invented ... Read More


US Patent Issued to Lam Research on April 14 for "Oxidation resistant protective layer in chamber conditioning" (Oregon Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,051, issued on April 14, was assigned to Lam Research Corp. (Fremont, Calif.). "Oxidation resistant protective layer in chamber conditioni... Read More


US Patent Issued to Kokusai Electric on April 14 for "Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium" (Japanese Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,052, issued on April 14, was assigned to Kokusai Electric Corp. (Tokyo). "Substrate processing apparatus, substrate processing method, met... Read More


US Patent Issued to APPLIED MATERIALS on April 14 for "Dog bone exhaust slit tunnel for processing chambers" (American, Indian Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,053, issued on April 14, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.). "Dog bone exhaust slit tunnel for processing chambe... Read More


US Patent Issued to SHIN-ETSU CHEMICAL on April 14 for "Method for producing a gallium oxide semiconductor film and a film forming apparatus" (Japanese Inventor)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,054, issued on April 14, was assigned to SHIN-ETSU CHEMICAL Co. LTD. (Tokyo). "Method for producing a gallium oxide semiconductor film and... Read More


US Patent Issued to SAMSUNG ELECTRONICS on April 14 for "Method of depositing atomic layer" (South Korean Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,055, issued on April 14, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Gyeonggi-do, South Korea). "Method of depositing atomic layer" was ... Read More


US Patent Issued to Centre National de la Recherche Scientifique, Universite de Lille, Centrale Lille Institut, Universite Polytechnique Hauts de France, Universite d'Artois, Nantes Universite on April 14 for "Method for manufacturing a thin-film lithiated material" (French Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,056, issued on April 14, was assigned to Centre National de la Recherche Scientifique (Paris), Universite de Lille (Lille, France), Central... Read More


US Patent Issued to Lam Research on April 14 for "Soaking and ESC clamping sequence for high bow substrates" (Oregon Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,057, issued on April 14, was assigned to Lam Research Corp. (Fremont, Calif.). "Soaking and ESC clamping sequence for high bow substrates"... Read More


US Patent Issued to Kokusai Electric on April 14 for "Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium" (Japanese Inventor)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,058, issued on April 14, was assigned to Kokusai Electric Corp. (Tokyo). "Substrate processing apparatus, method of manufacturing semicond... Read More