US Patent Issued to APPLIED MATERIALS on April 14 for "Dog bone exhaust slit tunnel for processing chambers" (American, Indian Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,053, issued on April 14, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).

"Dog bone exhaust slit tunnel for processing chambers" was invented by Vishwas Kumar Pandey (Madhya Pradesh, India), Ala Moradian (Sunnyvale, Calif.) and Zhepeng Cong (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A processing chamber is disclosed and includes a chamber body. The chamber body has a first side, a second side opposite the first side, a window assembly, and a base. The first and second side, the window assembly and the base define a thermal processing region. A flow assembly is disposed adjacent the first side and configured to int...