ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,755,935, issued on Oct. 6, was assigned to Lam Research Corp. (Fremont, Calif.). "Process control for ion energy delivery using multiple generat... Read More
ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,755,936, issued on Oct. 6, was assigned to Inspiring Atoms Pte Ltd (Singapore). "System and method for delivering pulsed RF power from a single ... Read More
ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,755,937, issued on Oct. 6, was assigned to Tokyo Electron Ltd. (Tokyo). "Plasma processing apparatus" was invented by Nozomu Nagashima (Miyagi, ... Read More
ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,755,938, issued on Oct. 6, was assigned to Tokyo Electron Ltd. (Tokyo). "Filter circuit and plasma processing apparatus" was invented by Taro Ik... Read More
ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,755,939, issued on Oct. 6, was assigned to Tokyo Electron Ltd. (Tokyo). "Plasma processing apparatus" was invented by Masaki Hirayama (Fuchu Cit... Read More
ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,755,940, issued on Oct. 6, was assigned to Tokyo Electron Ltd. (Tokyo). "Plasma processing apparatus" was invented by Mitsutoshi Ashida (Yamanas... Read More
ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,755,941, issued on Oct. 6, was assigned to Tokyo Electron Ltd. (Tokyo). "Modification method and modification device" was invented by Takafumi N... Read More
ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,755,942, issued on Oct. 6, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea) and New Power Plasma Co. LTD. (Pyeongtaek-si, Sou... Read More
ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,755,943, issued on Oct. 6, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "External cooling assembly for substrate support" was i... Read More
ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,755,944, issued on Oct. 6, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Electrostatically secured substrate support assembly" ... Read More