US Patent Issued to SAMSUNG ELECTRONICS, New Power Plasma on Oct. 6 for "Apparatus for conducting plasma surface treatment, board treatment system having the same, and method of manufacturing semiconductor devices using the same" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,755,942, issued on Oct. 6, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea) and New Power Plasma Co. LTD. (Pyeongtaek-si, South Korea).

"Apparatus for conducting plasma surface treatment, board treatment system having the same, and method of manufacturing semiconductor devices using the same" was invented by Junyoung Oh (Seoul, South Korea), Jaeho Kwak (Osan-si, South Korea), Boeun Jang (Hwaseong-si, South Korea), Seokyeon Hwang (Yongin-si, South Korea), Yongseok Seo (Seoul, South Korea), Sangsoo Kim (Cheonan-si, South Korea), Seunghwan Kim (Anyang-si, South Korea), Jongho Park (Daejeon, South Korea), Yongkwan Lee (Hwaseong-si, South Korea), Jongho Lee (Hwaseong-si,...