US Patent Issued to Tokyo Electron on Oct. 6 for "Filter circuit and plasma processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,755,938, issued on Oct. 6, was assigned to Tokyo Electron Ltd. (Tokyo).

"Filter circuit and plasma processing apparatus" was invented by Taro Ikeda (Nirasaki City, Japan), Shuto Watanabe (Nirasaki City, Japan) and Yuki Osada (Nirasaki City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A filter circuit, includes: a housing made of a conductor and including an input port and an output port, formed with outer and inner conductors, wherein the housing is at ground potential with the outer conductors and includes an internal space having an area extending in first and second directions orthogonal to each other in a plane view; a partition portion made...