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US Patent Issued to Advanced Energy Industries on April 21 for "High voltage power supplies for fast voltage changes" (Colorado Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,271, issued on April 21, was assigned to Advanced Energy Industries Inc. (Denver). "High voltage power supplies for fast voltage changes" ... Read More


US Patent Issued to Carl Zeiss Microscopy on April 21 for "Particle beam system" (German Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,272, issued on April 21, was assigned to Carl Zeiss Microscopy GmbH (Jena, Germany). "Particle beam system" was invented by Gero Walter (W... Read More


US Patent Issued to Japan Science and Technology Agency on April 21 for "Electron microscope, device for measuring electron-photon correlation, and method for measuring electron-photon correlation" (Japanese Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,273, issued on April 21, was assigned to Japan Science and Technology Agency (Saitama, Japan). "Electron microscope, device for measuring ... Read More


US Patent Issued to Hitachi High-Tech on April 21 for "Charged particle beam device" (Japanese Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,274, issued on April 21, was assigned to Hitachi High-Tech Corp. (Tokyo). "Charged particle beam device" was invented by Minami Shouji (To... Read More


US Patent Issued to GM GLOBAL TECHNOLOGY OPERATIONS on April 21 for "Orientation tool for electron backscatter diffraction" (Michigan Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,275, issued on April 21, was assigned to GM GLOBAL TECHNOLOGY OPERATIONS LLC (Detroit). "Orientation tool for electron backscatter diffrac... Read More


US Patent Issued to FEI on April 21 for "Mixed-gas species plasma source system" (Oregon Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,276, issued on April 21, was assigned to FEI Co. (Hillsboro, Ore.). "Mixed-gas species plasma source system" was invented by David Levi (H... Read More


US Patent Issued to Tokyo Electron on April 21 for "Method for determining amount of wear of edge ring, plasma processing apparatus, and substrate processing system" (Japanese Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,277, issued on April 21, was assigned to Tokyo Electron Ltd. (Tokyo). "Method for determining amount of wear of edge ring, plasma processi... Read More


US Patent Issued to NuFlare Technology on April 21 for "Multi charged particle beam writing method and multi charged particle beam writing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,278, issued on April 21, was assigned to NuFlare Technology Inc. (Yokohama, Japan). "Multi charged particle beam writing method and multi ... Read More


US Patent Issued to Applied Materials on April 21 for "In-situ ion beam angle measurement" (Massachusetts Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,279, issued on April 21, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "In-situ ion beam angle measurement" was invented b... Read More


US Patent Issued to Applied Materials on April 21 for "Substrate stress management using variable energy and variable dose implantation" (Massachusetts, California Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,280, issued on April 21, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Substrate stress management using variable energy ... Read More