ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,272, issued on April 21, was assigned to Carl Zeiss Microscopy GmbH (Jena, Germany).
"Particle beam system" was invented by Gero Walter (Westhausen, Germany), Holger Doemer (Bopfingen, Germany) and Wolfgang Berger (Gerstetten, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "A particle beam system comprises a particle beam column, a detection system and a controller. The particle beam column is configured to generate a particle beam and to direct it onto a sample, as a result of which charged particles are emitted by the sample. The detection system detects charged particles and comprises: an electrode, which can accelerate the charged partic...