US Patent Issued to PSK on May 5 for "Apparatus for treating substrate and method for aligning dielectric plate using the same" (South Korean Inventors)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,560, issued on May 5, was assigned to PSK INC. (Hwaseong-si, South Korea). "Apparatus for treating substrate and method for aligning dielectr... Read More

US Patent Issued to Tokyo Electron on May 5 for "Plasma processing apparatus and plasma processing method" (Japanese Inventors)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,561, issued on May 5, was assigned to Tokyo Electron Ltd. (Tokyo). "Plasma processing apparatus and plasma processing method" was invented by... Read More

US Patent Issued to Taiwan Semiconductor Manufacturing on May 5 for "Focus ring for a plasma-based semiconductor processing tool" (Taiwanese Inventors)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,562, issued on May 5, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan). "Focus ring for a plasma-based semicondu... Read More

US Patent Issued to Tokyo Electron, TOHOKU UNIVERSITY on May 5 for "Plasma processing apparatus and plasma processing method" (Japanese Inventor)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,563, issued on May 5, was assigned to Tokyo Electron Ltd. (Tokyo) and TOHOKU UNIVERSITY (Miyagi, Japan). "Plasma processing apparatus and pla... Read More

US Patent Issued to SAMSUNG ELECTRONICS on May 5 for "Semiconductor substrate processing apparatus" (South Korean Inventor)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,564, issued on May 5, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Suwon-si, South Korea). "Semiconductor substrate processing apparatus" wa... Read More

US Patent Issued to Tokyo Electron on May 5 for "Substrate processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,565, issued on May 5, was assigned to Tokyo Electron Ltd. (Tokyo). "Substrate processing apparatus" was invented by Tatsuya Yamaguchi (Nirasa... Read More

US Patent Issued to Lam Research on May 5 for "RF reference measuring circuit for a direct drive system supplying power to generate plasma in a substrate processing system" (California Inventor)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,566, issued on May 5, was assigned to Lam Research Corp. (Fremont, Calif.). "RF reference measuring circuit for a direct drive system supplyi... Read More

US Patent Issued to MOBILion Systems on May 5 for "Apparatus for ion manipulation having curved turn regions" (Pennsylvania Inventors)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,567, issued on May 5, was assigned to MOBILion Systems Inc. (Chadds Ford, Pa.). "Apparatus for ion manipulation having curved turn regions" w... Read More

US Patent Issued to Thermo Fisher Scientific (Bremen) on May 5 for "Analysing a field of a mass spectrometer" (German Inventor)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,568, issued on May 5, was assigned to Thermo Fisher Scientific (Bremen) GmbH (Bremen, Germany). "Analysing a field of a mass spectrometer" wa... Read More

US Patent Issued to CCL LABEL on May 5 for "Electronic circuits with directly integrated electrochemical cells" (California Inventors)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,570, issued on May 5, was assigned to CCL LABEL INC. (Strongsville, Ohio). "Electronic circuits with directly integrated electrochemical cell... Read More

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