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US Patent Issued to ASML Netherlands on May 5 for "Dynamic determination of a sample inspection recipe of charged particle beam inspection" (California Inventors)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,549, issued on May 5, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands). "Dynamic determination of a sample inspection recipe of... Read More


US Patent Issued to Imec vzw, Katholieke Universiteit Leuven on May 5 for "Method of performing metrology on a microfabrication pattern" (Belgian Inventors)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,550, issued on May 5, was assigned to Imec vzw (Leuven, Belgium) and Katholieke Universiteit Leuven (Leuven, Belgium). "Method of performing ... Read More


US Patent Issued to CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, INSTITUT NATIONAL DES SCIENCES APPLIQUEES DE ROUEN, UNIVERSITE DE ROUEN NORMANDIE on May 5 for "Tomographic atom probe with terahertz pulse generator" (French Inventors)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,551, issued on May 5, was assigned to CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (Paris), INSTITUT NATIONAL DES SCIENCES APPLIQUEES DE ROUEN... Read More


US Patent Issued to Applied Materials on May 5 for "Remote surface wave propagation for semiconductor chambers" (California Inventors)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,553, issued on May 5, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Remote surface wave propagation for semiconductor chambe... Read More


US Patent Issued to Tokyo Electron on May 5 for "Plasma processing with phase-locked waveforms" (New York Inventors)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,554, issued on May 5, was assigned to Tokyo Electron Ltd. (Tokyo). "Plasma processing with phase-locked waveforms" was invented by Pingshan L... Read More


US Patent Issued to Tokyo Electron on May 5 for "Systems and methods for plasma process" (Texas Inventors)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,555, issued on May 5, was assigned to Tokyo Electron Ltd. (Tokyo). "Systems and methods for plasma process" was invented by Charles Schlechte... Read More


US Patent Issued to HITACHI HIGH-TECH on May 5 for "Plasma processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,556, issued on May 5, was assigned to HITACHI HIGH-TECH Corp. (Tokyo). "Plasma processing apparatus" was invented by Tetsuo Kawanabe (Tokyo),... Read More


US Patent Issued to Tokyo Electron on May 5 for "Plasma processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,557, issued on May 5, was assigned to Tokyo Electron Ltd. (Tokyo). "Plasma processing apparatus" was invented by Syouji Yamagishi (Nirasaki, ... Read More


US Patent Issued to SEMES on May 5 for "Apparatus for processing substrate and method of processing substrate" (South Korean Inventors)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,558, issued on May 5, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea). "Apparatus for processing substrate and method of proc... Read More


US Patent Issued to SAMSUNG ELECTRONICS on May 5 for "Gas supply device and plasma processing apparatus" (South Korean Inventors)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,559, issued on May 5, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea). "Gas supply device and plasma processing apparatu... Read More