US Patent Issued to Canon on Aug. 25 for "Light source apparatus, lithography apparatus, and article manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,717,240, issued on Aug. 25, was assigned to Canon K.K. (Tokyo). "Light source apparatus, lithography apparatus, and article manufacturing metho... Read More

US Patent Issued to ZHEJIANG CHEER TECHNOLOGY on Aug. 25 for "Immersion fluid recovery system and immersion fluid recovery method using said system" (Chinese Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,717,241, issued on Aug. 25, was assigned to ZHEJIANG CHEER TECHNOLOGY Co. LTD. (Hangzhou, China). "Immersion fluid recovery system and immersio... Read More

US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on Aug. 25 for "Method of operating semiconductor apparatus" (Taiwanese Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,717,242, issued on Aug. 25, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING Co. LTD. (Hsinchu, Taiwan). "Method of operating semiconductor a... Read More

US Patent Issued to ASML NETHERLANDS on Aug. 25 for "Methods of determining process models by machine learning" (Dutch, American Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,717,243, issued on Aug. 25, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands). "Methods of determining process models by machine l... Read More

US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on Aug. 25 for "Tool mismatch reduction using aberration map of the tools" (Taiwanese Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,717,244, issued on Aug. 25, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan). "Tool mismatch reduction using a... Read More

US Patent Issued to FUJIFILM on Aug. 25 for "Inspection method, method for producing composition, and method for verifying composition" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,717,245, issued on Aug. 25, was assigned to FUJIFILM Corp. (Tokyo). "Inspection method, method for producing composition, and method for verify... Read More

US Patent Issued to Intel on Aug. 25 for "One-dimensional overlay marks" (Oregon Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,717,246, issued on Aug. 25, was assigned to Intel Corp. (Santa Clara, Calif.). "One-dimensional overlay marks" was invented by William Blanton ... Read More

US Patent Issued to SAMSUNG ELECTRONICS on Aug. 25 for "Method of correcting overlay, method of controlling semiconductor process, and semiconductor processing apparatus" (South Korean Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,717,247, issued on Aug. 25, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea). "Method of correcting overlay, method of cont... Read More

US Patent Issued to KLA on Aug. 25 for "Off-axis through the lens mutually coherent dark field imaging system with incoherent light for overlay metrology" (California Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,717,248, issued on Aug. 25, was assigned to KLA Corp. (Milpitas, Calif.). "Off-axis through the lens mutually coherent dark field imaging syste... Read More

US Patent Issued to ASML HOLDING on Aug. 25 for "Split double sided wafer and reticle clamps" (Connecticut Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,717,249, issued on Aug. 25, was assigned to ASML HOLDING N.V. (Veldhoven, Netherlands). "Split double sided wafer and reticle clamps" was inven... Read More

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