ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,717,246, issued on Aug. 25, was assigned to Intel Corp. (Santa Clara, Calif.).
"One-dimensional overlay marks" was invented by William Blanton (Cornelius, Ore.), Deepak Selvanathan (Portland, Ore.), Shakul Tandon (Portland, Ore.) and Martin N. Weiss (Portland, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein include semiconductor die with overlay marks, electronic devices that include semiconductor dies with overlay marks, and methods of measuring overlay. In one embodiment, a semiconductor die includes multiple overlay marks, including a first overlay mark and a second overlay mark. The first overlay mark is at a first p...