US Patent Issued to Canon on Aug. 25 for "Light source apparatus, lithography apparatus, and article manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,717,240, issued on Aug. 25, was assigned to Canon K.K. (Tokyo).

"Light source apparatus, lithography apparatus, and article manufacturing method" was invented by Mahiro Saito (Tochigi, Japan) and Mizuma Murakami (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A light source apparatus includes a light source, a first housing configured to store the light source, a planar surface of the first housing including a plurality of openings communicating with an outside of the first housing, and a plurality of portions, disposed on the planar surface, each having an inclined plane inclining with respect to the planar surface. At least one of the p...