US Patent Issued to ZHONGKE JINGYUAN ELECTRON Ltd. BEIJING (CN) on May 19 for "Load-bearing device, wafer transfer device, chamber device and wafer processing apparatus" (Chinese Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,461, issued on May 19, was assigned to ZHONGKE JINGYUAN ELECTRON Ltd. BEIJING (CN) (Beijing).

"Load-bearing device, wafer transfer device, chamber device and wafer processing apparatus" was invented by Lei Jiang (Beijing) and Tao Mi (Beijing).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides a load-bearing device telescopic relative to a reference object, a wafer transfer device, a chamber device which is configured to exchange wafers between different pressure environments, and a wafer processing apparatus, the load-bearing device including a base, a movable platform opposite to the base, an ejector rod which is configure...