US Patent Issued to ZHEJIANG CHEER TECHNOLOGY on July 21 for "Immersion liquid supply system and immersion liquid flow field removal method therefor" (Chinese Inventors)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,687,783, issued on July 21, was assigned to ZHEJIANG CHEER TECHNOLOGY Co. LTD. (Hangzhou, China).

"Immersion liquid supply system and immersion liquid flow field removal method therefor" was invented by Xin Fu (Hangzhou, China), Yiwen Zhao (Hangzhou, China), Min Wu (Hangzhou, China), Ning Xu (Hangzhou, China) and Wenyu Chen (Hangzhou, China).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed are an immersion liquid supply system and an immersion flow field removal method thereof. The immersion liquid supply system comprises an immersion liquid supply source, a liquid supply valve and an immersion liquid suction assembly, wherein the liquid supply v...