ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,717,241, issued on Aug. 25, was assigned to ZHEJIANG CHEER TECHNOLOGY Co. LTD. (Hangzhou, China).
"Immersion fluid recovery system and immersion fluid recovery method using said system" was invented by Xin Fu (Hangzhou, China), Youyang Chi (Hangzhou, China), Min Wu (Hangzhou, China), Yuan Li (Hangzhou, China), Jinjie Tong (Hangzhou, China), Liang Du (Hangzhou, China), Ning Xu (Hangzhou, China) and Wenyu Chen (Hangzhou, China).
According to the abstract* released by the U.S. Patent & Trademark Office: "An immersion fluid recovery system and method. The system includes a recovery cavity, a sealing extraction opening, a recovery flow path, a gas-liquid separator, and an orifice plate; t...