ALEXANDRIA, Va., March 31 -- United States Patent no. 12,589,998, issued on March 31, was assigned to ZHEJIANG BRITECH Co. LTD. (Quzhou, China).
"Method for preparing trisilylamine (TSA) at ultra-low temperature" was invented by Wenhui Xiong (Quzhou, China), Qinqi Xu (Quzhou, China), Gang Chen (Quzhou, China), Jun Li (Quzhou, China), Guangdi Zhang (Quzhou, China), Huilong He (Quzhou, China), Xiaodong Zhang (Quzhou, China) and Ping Li (Quzhou, China).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to the technical field of preparation of trisilylamine (TSA), in particular to a method for preparing TSA at an ultra-low temperature. The present disclosure provides a method for prepar...