US Patent Issued to Yield Engineering Systems on July 14 for "Unified rinse and dry cleaning apparatus and methods" (Indian Inventors)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,685,065, issued on July 14, was assigned to Yield Engineering Systems Inc. (Fremont, Calif.).

"Unified rinse and dry cleaning apparatus and methods" was invented by Arvind Patil (Bangalore, India), Sanjay Kumar (Bangalore, India) and Harish Ravikumar (Bangalore, India).

According to the abstract* released by the U.S. Patent & Trademark Office: "A cleaning apparatus incudes a plurality of tubes with angled orifices. An angled liquid stream is directed through the orifices to impinge on a surface of a substrate and clean the surface as the substrate moves in one direction through the space between a pair of tubes. An angled gas stream is then directed through the orifices to impinge on...