ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,735,605, issued on Sept. 15, was assigned to YCCHEM Co. LTD. (Gyeongsangbuk-do, South Korea).
"Polishing composition for semiconductor processing, method for preparing polishing composition, and method for manufacturing semiconductor element to which polishing composition is applied" was invented by Han Teo Park (Seoul, South Korea), Deok Su Han (Seoul, South Korea), Jang Kuk Kwon (Seoul, South Korea) and Seung Chul Hong (Seoul, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention relates to a polishing composition for a semiconductor process, a method of preparing the polishing composition, and a method of fabricating a sem...