US Patent Issued to WATLOW ELECTRIC MANUFACTURING on Feb. 24 for "Multi-layer ceramic plate device" (California, Oregon Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,558,734, issued on Feb. 24, was assigned to WATLOW ELECTRIC MANUFACTURING COMPANY (St. Louis).

"Multi-layer ceramic plate device" was invented by Michael Parker (Brentwood, Calif.), Alfred Grant Elliot (Palo Alto, Calif.), Brent Donald Alfred Elliot (Cupertino, Calif.), Frank Balma (Los Gatos, Calif.), Richard Erich Schuster (Milpitas, Calif.), Dennis George Rex (Williams, Ore.) and Alexander Veytser (Mountain View, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic chuck includes a ceramic top plate layer made of a beryllium oxide material, a ceramic bottom plate layer made of a beryllium oxide material, a ceramic middle plate layer...