US Patent Issued to United States of America as represented by the Secretary of the Air Force on June 23 for "Ion irradiation of microelectromechanical resonators" (Ohio Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,665,562, issued on June 23, was assigned to United States of America as represented by the Secretary of the Air Force (Wright-Patterson AFB, Ohio).

"Ion irradiation of microelectromechanical resonators" was invented by Hengky Chandrahalim (Beavercreek, Ohio) and David Lynes (Wright-Patterson AFB, Ohio).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of enhancing an electromechanical coupling coefficient of a microelectromechanical ("MEMS") device. The method includes applying, to a fully fabricated MEMS device, heavy particle ion radiation to the MEMS device at a fluence of at least 1x1014 cm-2. According to other embodiments of the present inven...