US Patent Issued to UCHICAGO ARGONNE on Oct. 6 for "Calorimetry method to measure chemical reaction heat in ALD/ALE processes using temperature-sensitive resistance coatings" (Illinois Inventors)

ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,753,510, issued on Oct. 6, was assigned to UCHICAGO ARGONNE LLC (Chicago).

"Calorimetry method to measure chemical reaction heat in ALD/ALE processes using temperature-sensitive resistance coatings" was invented by Anil U. Mane (Naperville, Ill.) and Jeffrey W. Elam (Elmhurst, Ill.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A calorimetry sensor having a porous substrate and a temperature sensitive resistive coating. The calorimetry sensor has a known temperature coefficient of resistance. A process utilizes the known temperature coefficient of resistance and monitors changes in resistance of the calorimetry sensor to determine changes in temperature ...