US Patent Issued to TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING on Sept. 15 for "Device and method for laser beam caustic measurement and laser beam system" (German, American Inventors)

ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,736,435, issued on Sept. 15, was assigned to TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SE (Ditzingen, Germany).

"Device and method for laser beam caustic measurement and laser beam system" was invented by Steffen Erhard (Korntal-Munchingen, Germany), Viktor Granson (San Diego), Clemens Kieninger (Stuttgart, Germany), Andreas Herdt (Darmstadt, Germany) and Vincent Hahn (Karlsruhe, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A device for measuring caustic parameters of a laser beam includes a beam splitter for splitting the laser beam into at least three spatially separated partial beams, and a detection unit for detecting images of ...