ALEXANDRIA, Va., July 14 -- United States Patent no. 12,680,155, issued on July 14, was assigned to Tripod Technology Corp. (Taoyuan City, Taiwan).
"Method for forming film" was invented by Yu-Ming Chang (Taoyuan City, Taiwan), Yun-Shan Wang (Taoyuan City, Taiwan), Hsien-Yeh Chen (Taoyuan City, Taiwan) and Paichun Chang (Taoyuan City, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for forming film includes the following steps: controlling a temperature of a workpiece in a chamber, so that a gaseous state sacrificial material desublimates into solid state on a surface of the workpiece to form a solid state sacrificial material layer; controlling a pressure in the chamber and the temperature of...